METHOD OF MAKING MEMBRANE STRUCTURES

FIELD: physics. ^ SUBSTANCE: method of making membrane structures involves preparation of a substrate from green ceramic, making at least one hole in said substrate, making a membrane workpiece from the green ceramic, assembling the membrane structure by joining said membrane workpiece with the surf...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITAL'JANTSEV ALEKSANDR GEORGIEVICH, SHUL'GA JULIJA VIKTOROVNA, GORNEV EVGENIJ SERGEEVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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