METHOD FOR MAKING PHOTO-TEMPLATE BLANKS

FIELD: micro-electronics, in particular, method for making photo-template blanks. ^ SUBSTANCE: method includes preparation of masking layer of iron oxide in alkali oxidizing compound, containing hypochlorite, while maintaining their constant concentration, thus making it possible to execute surface...

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Bibliographische Detailangaben
1. Verfasser:	NIKITIN SERGEJ ALEKSEEVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PRINTED CIRCUITS
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Beschreibung
Zusammenfassung:	FIELD: micro-electronics, in particular, method for making photo-template blanks. ^ SUBSTANCE: method includes preparation of masking layer of iron oxide in alkali oxidizing compound, containing hypochlorite, while maintaining their constant concentration, thus making it possible to execute surface preparation process with etching of surface-adjacent layer due to generation of atomic oxygen during decomposition of hypochlorite to following operation of applying resist. ^ EFFECT: increased efficiency of washing off of masking layers based on iron oxide. ^ 2 cl, 1 tbl