SCANNING PROBING MICROSCOPE, COMBINED WITH DEVICE FOR MODIFYING SURFACE OF OBJECT

FIELD: measuring equipment engineering, namely, engineering of devices for measuring, using scanning probing microscope, of relief, linear dimensions and physical characteristics of surface of objects in modes of scanning tunnel microscope, atom-force microscope, close-field optical microscope. ^ SU...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EFIMOV ANTON EVGEN'EVICH, MATSKO NADEZHDA BORISOVNA, SAUNIN SERGEJ ALEKSEEVICH, MARTIN MJULLER, SOKOLOV DMITRIJ JUR'EVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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