SCANNING PROBING MICROSCOPE, COMBINED WITH DEVICE FOR MODIFYING SURFACE OF OBJECT

FIELD: measuring equipment engineering, namely, engineering of devices for measuring, using scanning probing microscope, of relief, linear dimensions and physical characteristics of surface of objects in modes of scanning tunnel microscope, atom-force microscope, close-field optical microscope. ^ SUBSTANCE: scanning probing microscope, combined with device for mechanical modification of surface of object, contains cryogenic chamber, first mechanism for moving object holder, first platform with plunger, scanning device by three coordinates with probe holder, mated with device for preliminary approach of probe holder and object holder, base element. Scanning device is mounted on device for preliminary approach by means of adapter. Device for preliminary approach is held on left platform. Probe holder, scanning device by three coordinates, adapter, base element and first mechanism are provided, respectively, by first, second, third, fourth and fifth thermal compensators. Between probe holder and object holder, connecting element is mounted. ^ EFFECT: increased resolution capacity of device. ^ 14 cl, 11 dwg