MICROMECHANICAL GYROSCOPE

FIELD: micromechanical engineering. ^ SUBSTANCE: micromechanical gyroscope comprises rotor and stator provided with the first group of electrodes that define a motor along the axis of vibration excitation, second group of electrodes arranged along the axis of measurements of the output signal, capac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: NEKRASOV JAKOV ANATOL'EVICH
Format: Patent
Sprache:eng ; rus
Schlagworte:
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