HIGH-PURITY MONOSILANE PRODUCTION PROCESS

FIELD: organosilicon materials. ^ SUBSTANCE: invention relates to a process for production of high-purity monosilane suitable to form thin-film semiconductor products as well as high-purity poly- and monocrystalline silicon for a variety of applications (semiconductor engineering, solar power engine...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	EFIMOV NIKOLAJ KONSTANTINOVICH, LEBEDEV EVGENIJ NIKOLAEVICH, STOROZHENKO PAVEL ARKAD'EVICH, GORSHKOV ALEKSANDR SERGEEVICH, BELOV EVGENIJ PETROVICH, MONIN EVGENIJ ALEKSEEVICH, TEMOSH IVAN IVANOVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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