MICRODISPLACEMENT DEVICE

FIELD: research instrumentation engineering. ^ SUBSTANCE: proposed device that can be used in scanning probe microscopes and nanotechnology units for microdisplacement of objects has base, piezoelectric tube with electrodes one of whose ends is secured on base and other one is provided with first su...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHELKOVNIKOV EVGENIJ JUR'EVICH, GULJAEV PAVEL VALENTINOVICH, LIPANOV ALEKSEJ MATVEEVICH, PANICH ANATOLIJ EVGEN'EVICH, OSIPOV NIKOLAJ IVANOVICH
Format:	Patent
Sprache:	eng ; rus
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION SEMICONDUCTOR DEVICES
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