INTEGRAL ACCELEROMETER SENSITIVE ELEMENT

FIELD: measurement technology. ^ SUBSTANCE: sensitive element is made of conductive monocrystalline silicon and has pendulum connected with frame edge by means of flexible suspensions. Frame is connected with carrier frame by means of cantilever beam. Carrier frame is rigidly connected to base of ac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MIRONOV S.G, VAVILOV V.D, BYLINKIN S.F
Format: Patent
Sprache:eng ; rus
Schlagworte:
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