INTEGRAL ACCELEROMETER SENSITIVE ELEMENT
FIELD: measurement technology. ^ SUBSTANCE: sensitive element is made of conductive monocrystalline silicon and has pendulum connected with frame edge by means of flexible suspensions. Frame is connected with carrier frame by means of cantilever beam. Carrier frame is rigidly connected to base of ac...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng ; rus |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Schreiben Sie den ersten Kommentar!