METHOD FOR PRODUCING QUASI-BICRYSTAL ZINC OXIDE STRUCTURES

FIELD: electronic material science. SUBSTANCE: part of single-crystalline substrate is covered with thin basic grain oriented layer by magnetron spraying with use of mask, substrate temperature being not over 500 K. Epitaxial layers are grown on entire substrate surface by method of chemical transpo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAMEDOV V.V, ATAEV B.M, OMAEV A.K, KAMILOV I.K, BAGAMADOVA A.M, MAKHMUDOV S.SH
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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