METHOD OF SYNTHESIS OF SILANE

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silici...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TRUSHNIKOVA L.N, MUKHIN V.V, ZELENIN JU.M, LAVRENT'EV V.I, LAVRENJUK P.I, ROZHKOV V.V, STONOGA JU.A, SOKOLOV V.V, MURATOV E.P
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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