METHOD OF SYNTHESIS OF SILANE

METHOD OF SYNTHESIS OF SILANE

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silici...

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Hauptverfasser: TRUSHNIKOVA L.N, MUKHIN V.V, ZELENIN JU.M, LAVRENT'EV V.I, LAVRENJUK P.I, ROZHKOV V.V, STONOGA JU.A, SOKOLOV V.V, MURATOV E.P
Format: Patent
Sprache:eng
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CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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creator TRUSHNIKOVA L.N
MUKHIN V.V
ZELENIN JU.M
LAVRENT'EV V.I
LAVRENJUK P.I
ROZHKOV V.V
STONOGA JU.A
SOKOLOV V.V
MURATOV E.P
description FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silicide is used as silicide and interaction is carried out at the room temperature using acetic and hydrochloric acids. EFFECT: increased yield of silane, decreased cost of product. 2 ex
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subjects CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
title METHOD OF SYNTHESIS OF SILANE
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