METHOD OF SYNTHESIS OF SILANE

FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silici...

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Bibliographische Detailangaben
Hauptverfasser:	TRUSHNIKOVA L.N, MUKHIN V.V, ZELENIN JU.M, LAVRENT'EV V.I, LAVRENJUK P.I, ROZHKOV V.V, STONOGA JU.A, SOKOLOV V.V, MURATOV E.P
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:	FIELD: inorganic chemistry, chemical technology. SUBSTANCE: invention relates to technology of preparing semiconductive silicon and to technology of formation of different silicon-containing layers in microelectronics. Process is performed by interaction of silicide with mineral acid. Lithium silicide is used as silicide and interaction is carried out at the room temperature using acetic and hydrochloric acids. EFFECT: increased yield of silane, decreased cost of product. 2 ex