EQUIPMENT FOR MEASURING ROUGHNESSES BELOW THE NANOMETRIC RANGE BY POLARIZATION INTERFEROMETRY
The invention relates to an equipment for measuring roughnesses below the nanometric range by polarization interferometry. According to the invention, the equipment comprises a laser diode (1) emitting a laser beam led by a dividing cube (2) to a Wollaston prism (3) having an angle Θ =6°44' hav...
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| creator | STEGARU F NEL URSU DAN AN U MAGDALENA |
| description | The invention relates to an equipment for measuring roughnesses below the nanometric range by polarization interferometry. According to the invention, the equipment comprises a laser diode (1) emitting a laser beam led by a dividing cube (2) to a Wollaston prism (3) having an angle Θ =6°44' having the role of separating the incident beam into two beams passing through a microscope provided with an eyepiece (4) of 12.5 x, a tube lens (5) of 250 mm and an objective lens (6) of 12.5 x computed for optical infinity, at the microscope outlet the beams fall on a sample piece (7) to be tested, after the reflection on the sample piece (7) they follow the same path through the microscope, prism (3) and dividing cube (2), the resulting beam being led to a lens (10) which focuses it on a diaphragm (13), between the lens (10) and the diaphragm (13) there being placed a birefringence modulator (11) and an analyzer (12), the beam being then detected by a photodiode (14) providing a current in proportion to the flow incident thereto, the current being filtered by a synchronization detector (15) achieving a band-pass filtering and providing an amplitude of the signal which is then processed by means of a software computing the differential profile and the unevenness of the surface of the sample piece to be tested.
Invenţia se referă la un echipament pentru măsurarea rugozităţilor subnanometrice prin interferometrie de polarizare. Echipamentul conform invenţiei este alcătuit dintr-o diodă (1) laser, care emite un fascicul laser ce este dirijat de un cub divizor (2), către o prismă (3) Wollaston, care are un unghi Θ = 6°44' şi ce are rolul de a separa fasciculul incident în două fascicule care tranzitează un microscop dotat cu un ocular (4) de 12.5 x, o lentilă (5) de tub de 250 mm şi un obiectiv (6) de 12.5 x calculat pentru infinit, la ieşirea din microscop fasciculele cad pe o probă (7) de verificat, iar după reflexia pe probă (7), urmează acelaşi drum prin microscop, prismă (3) şi cub (2) divizor, fasciculul rezultat fiind dirijat spre o lentilă (10) care îl va focaliza pe o diafragmă (13), între lentilă (10) şi diafragmă (13) fiind plasate un modulator (11) de birefringenţă şi un analizor (12), fasciculul fiind apoi detectat de o fotodiodă (14) ce furnizează un curent proporţional cu fluxul incident pe ea, curent filtrat de un detector (15) sincronizare ce realizează un filtraj trece bandă şi furnizează o amplitudine a semnalului care este apoi prelucrat prin intermedi |
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Invenţia se referă la un echipament pentru măsurarea rugozităţilor subnanometrice prin interferometrie de polarizare. Echipamentul conform invenţiei este alcătuit dintr-o diodă (1) laser, care emite un fascicul laser ce este dirijat de un cub divizor (2), către o prismă (3) Wollaston, care are un unghi Θ = 6°44' şi ce are rolul de a separa fasciculul incident în două fascicule care tranzitează un microscop dotat cu un ocular (4) de 12.5 x, o lentilă (5) de tub de 250 mm şi un obiectiv (6) de 12.5 x calculat pentru infinit, la ieşirea din microscop fasciculele cad pe o probă (7) de verificat, iar după reflexia pe probă (7), urmează acelaşi drum prin microscop, prismă (3) şi cub (2) divizor, fasciculul rezultat fiind dirijat spre o lentilă (10) care îl va focaliza pe o diafragmă (13), între lentilă (10) şi diafragmă (13) fiind plasate un modulator (11) de birefringenţă şi un analizor (12), fasciculul fiind apoi detectat de o fotodiodă (14) ce furnizează un curent proporţional cu fluxul incident pe ea, curent filtrat de un detector (15) sincronizare ce realizează un filtraj trece bandă şi furnizează o amplitudine a semnalului care este apoi prelucrat prin intermediul unui software ce calculează profilul diferenţial şi denivelările suprafeţei probei de verificat.</description><language>eng ; rum</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; RADIATION PYROMETRY ; TESTING</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110128&DB=EPODOC&CC=RO&NR=200900074U1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110128&DB=EPODOC&CC=RO&NR=200900074U1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>STEGARU F NEL</creatorcontrib><creatorcontrib>URSU DAN</creatorcontrib><creatorcontrib>AN U MAGDALENA</creatorcontrib><title>EQUIPMENT FOR MEASURING ROUGHNESSES BELOW THE NANOMETRIC RANGE BY POLARIZATION INTERFEROMETRY</title><description>The invention relates to an equipment for measuring roughnesses below the nanometric range by polarization interferometry. According to the invention, the equipment comprises a laser diode (1) emitting a laser beam led by a dividing cube (2) to a Wollaston prism (3) having an angle Θ =6°44' having the role of separating the incident beam into two beams passing through a microscope provided with an eyepiece (4) of 12.5 x, a tube lens (5) of 250 mm and an objective lens (6) of 12.5 x computed for optical infinity, at the microscope outlet the beams fall on a sample piece (7) to be tested, after the reflection on the sample piece (7) they follow the same path through the microscope, prism (3) and dividing cube (2), the resulting beam being led to a lens (10) which focuses it on a diaphragm (13), between the lens (10) and the diaphragm (13) there being placed a birefringence modulator (11) and an analyzer (12), the beam being then detected by a photodiode (14) providing a current in proportion to the flow incident thereto, the current being filtered by a synchronization detector (15) achieving a band-pass filtering and providing an amplitude of the signal which is then processed by means of a software computing the differential profile and the unevenness of the surface of the sample piece to be tested.
Invenţia se referă la un echipament pentru măsurarea rugozităţilor subnanometrice prin interferometrie de polarizare. Echipamentul conform invenţiei este alcătuit dintr-o diodă (1) laser, care emite un fascicul laser ce este dirijat de un cub divizor (2), către o prismă (3) Wollaston, care are un unghi Θ = 6°44' şi ce are rolul de a separa fasciculul incident în două fascicule care tranzitează un microscop dotat cu un ocular (4) de 12.5 x, o lentilă (5) de tub de 250 mm şi un obiectiv (6) de 12.5 x calculat pentru infinit, la ieşirea din microscop fasciculele cad pe o probă (7) de verificat, iar după reflexia pe probă (7), urmează acelaşi drum prin microscop, prismă (3) şi cub (2) divizor, fasciculul rezultat fiind dirijat spre o lentilă (10) care îl va focaliza pe o diafragmă (13), între lentilă (10) şi diafragmă (13) fiind plasate un modulator (11) de birefringenţă şi un analizor (12), fasciculul fiind apoi detectat de o fotodiodă (14) ce furnizează un curent proporţional cu fluxul incident pe ea, curent filtrat de un detector (15) sincronizare ce realizează un filtraj trece bandă şi furnizează o amplitudine a semnalului care este apoi prelucrat prin intermediul unui software ce calculează profilul diferenţial şi denivelările suprafeţei probei de verificat.</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyr0KwjAQAOAuDqK-w4GzEH9AOqbl0gTau3pJkApSisRJtFDfH0F8AKdv-ebZFU_RtQ1SAMMCDWofxVEFwrGyhN6jhwJrPkOwCKSJGwziShBNFULRQcu1FnfRwTGBo4BiUL6rW2az-_CY0urnIlsbDKXdpPHVp2kcbumZ3r3wTqlcKXU8xLjd_7c-F-o0lQ</recordid><startdate>20110128</startdate><enddate>20110128</enddate><creator>STEGARU F NEL</creator><creator>URSU DAN</creator><creator>AN U MAGDALENA</creator><scope>EVB</scope></search><sort><creationdate>20110128</creationdate><title>EQUIPMENT FOR MEASURING ROUGHNESSES BELOW THE NANOMETRIC RANGE BY POLARIZATION INTERFEROMETRY</title><author>STEGARU F NEL ; URSU DAN ; AN U MAGDALENA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_RO200900074UU13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; rum</language><creationdate>2011</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>STEGARU F NEL</creatorcontrib><creatorcontrib>URSU DAN</creatorcontrib><creatorcontrib>AN U MAGDALENA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>STEGARU F NEL</au><au>URSU DAN</au><au>AN U MAGDALENA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>EQUIPMENT FOR MEASURING ROUGHNESSES BELOW THE NANOMETRIC RANGE BY POLARIZATION INTERFEROMETRY</title><date>2011-01-28</date><risdate>2011</risdate><abstract>The invention relates to an equipment for measuring roughnesses below the nanometric range by polarization interferometry. According to the invention, the equipment comprises a laser diode (1) emitting a laser beam led by a dividing cube (2) to a Wollaston prism (3) having an angle Θ =6°44' having the role of separating the incident beam into two beams passing through a microscope provided with an eyepiece (4) of 12.5 x, a tube lens (5) of 250 mm and an objective lens (6) of 12.5 x computed for optical infinity, at the microscope outlet the beams fall on a sample piece (7) to be tested, after the reflection on the sample piece (7) they follow the same path through the microscope, prism (3) and dividing cube (2), the resulting beam being led to a lens (10) which focuses it on a diaphragm (13), between the lens (10) and the diaphragm (13) there being placed a birefringence modulator (11) and an analyzer (12), the beam being then detected by a photodiode (14) providing a current in proportion to the flow incident thereto, the current being filtered by a synchronization detector (15) achieving a band-pass filtering and providing an amplitude of the signal which is then processed by means of a software computing the differential profile and the unevenness of the surface of the sample piece to be tested.
Invenţia se referă la un echipament pentru măsurarea rugozităţilor subnanometrice prin interferometrie de polarizare. Echipamentul conform invenţiei este alcătuit dintr-o diodă (1) laser, care emite un fascicul laser ce este dirijat de un cub divizor (2), către o prismă (3) Wollaston, care are un unghi Θ = 6°44' şi ce are rolul de a separa fasciculul incident în două fascicule care tranzitează un microscop dotat cu un ocular (4) de 12.5 x, o lentilă (5) de tub de 250 mm şi un obiectiv (6) de 12.5 x calculat pentru infinit, la ieşirea din microscop fasciculele cad pe o probă (7) de verificat, iar după reflexia pe probă (7), urmează acelaşi drum prin microscop, prismă (3) şi cub (2) divizor, fasciculul rezultat fiind dirijat spre o lentilă (10) care îl va focaliza pe o diafragmă (13), între lentilă (10) şi diafragmă (13) fiind plasate un modulator (11) de birefringenţă şi un analizor (12), fasciculul fiind apoi detectat de o fotodiodă (14) ce furnizează un curent proporţional cu fluxul incident pe ea, curent filtrat de un detector (15) sincronizare ce realizează un filtraj trece bandă şi furnizează o amplitudine a semnalului care este apoi prelucrat prin intermediul unui software ce calculează profilul diferenţial şi denivelările suprafeţei probei de verificat.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY TESTING |
| title | EQUIPMENT FOR MEASURING ROUGHNESSES BELOW THE NANOMETRIC RANGE BY POLARIZATION INTERFEROMETRY |
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