WAFER PRE-ALIGNER AND METHOD OF PRE-ALIGNING A WAFER

A pre-aligner for pre-aligning a wafer having a notch. The pre-aligner includes a wafer platform having a wafer receiving surface, and a drive device. A detector is provided to detect the notch, and a memory is provided to store a notch window defining a range of angles in which the notch is predict...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROGERS, JOHN CHARLES, SWIECICKI, MARGARET KATHLEEN
Format:	Patent
Sprache:	eng ; pol
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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