DEVICE AND METHOD FOR DETERMINING THE FOCUS POSITION OF A HIGH ENERGY BEAM

An apparatus includes a focusing element arranged to focus a high-energy beam on a workpiece, an image detector for recording at least one image of an area to be monitored on the surface of the workpiece and/or the reference contour; imaging optics arranged to (a) receive process radiation radiation...

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Bibliographische Detailangaben
1. Verfasser: REGAARD, BORIS
Format: Patent
Sprache:eng ; pol
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