Method of manufacturing a piezoresistive pressure measuring transducer

Bibliographische Detailangaben

Hauptverfasser:	KOWALSKI PAWE, STUDZI SKA KRYSTYNA, GRABIEC PIOTR, LATECKI BOGDAN, BUDZY SKI TADEUSZ
Format:	Patent
Sprache:	eng ; pol
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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