ETCHANT SOLUTIONS AND METHOD OF USE THEREOF

ABSTRACT OF THE DISCLOSURE Etching compositions and method of using the etching compositions comprising potassium hydroxide; one or more than one additional alkaline compounds selected from the group consisting of TEAH, TMAF and NH40H; and water; or etching compositions comprising one or more than o...

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Bibliographische Detailangaben
Hauptverfasser: PARRIS, GENE EVERAD, CASTEEL, JR., WILLIAM JACK, CHEN, TIANNIU
Format: Patent
Sprache:eng
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