Optical measurement method and sensor apparatus

An optical measurement method using an optical sensor apparatus, the optical sensor apparatus comprising an optical element comprising a mark configured to selectively transmit incident radiation, a photodetector configured to receive radiation transmitted by the mark and provide an output signal th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WOUTER JOEP ENGELEN, THEODORUS FRANCISCUS EMILIUS MARIA OVERES, JORIS MARIA GERARDUS LOOMAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!