MOTOR, DUAL STROKE STAGE AND LITHOGRAPHIC APPARATUS

The invention relates to a motor comprising: a stationary part, comprising: a row of coil assemblies, the coil assemblies having multiple phases, a movable part, comprising: a row of permanent magnets, wherein the row of coil assemblies has a first length and the row of permanent magnets has a secon...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JEROEN VAN DUIVENBODE, RUUD HUBERTUS SILVESTER VRENKEN, PETER MICHEL SILVESTER MARIA HEIJMANS, JOOST JOHAN BOLDER
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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