An Object in a Lithographic Apparatus

A lithographic apparatus comprising: an object, the object comprising: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower lay...

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Hauptverfasser:	JOOST ANDRÉ KLUGKIST, MAXIM ALEKSANDROVICH NASALEVICH, ROLAND JOHANNES WILHELMUS STAS, ANDREY NIKIPELOV, SANDRO WRICKE, VADIM YEVGENYEVICH BANINE
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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creator	JOOST ANDRÉ KLUGKIST MAXIM ALEKSANDROVICH NASALEVICH ROLAND JOHANNES WILHELMUS STAS ANDREY NIKIPELOV SANDRO WRICKE VADIM YEVGENYEVICH BANINE
description	A lithographic apparatus comprising: an object, the object comprising: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower layer being greater than a bond strength between the intermediate layer and the upper layer and the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.
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subjects	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
title	An Object in a Lithographic Apparatus
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