Monitoring Apparatus, Lithographic Apparatus and Method of Monitoring a Change in a Property

Disclosed is a monitoring apparatus configured to monitor a change in a property. The monitoring apparatus comprises a fiber-Bragg grating sensor, an amplifier, an integrator and a processor. The fiber-Bragg grating sensor is operable to sense a band of wavelengths of incident radiation and to outpu...

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Bibliographische Detailangaben

Hauptverfasser:	JOHANNES ANTONIUS GERARDUS AKKERMANS, JOHANNES ADRIANUS PETRUS LEIJTENS, MICHAEL BENJAMIN HAVERDINGS, GEORGE ALOIS LEONIE LEENKNEGT, PIETER LUCAS KAT
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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