SUPPORT DEVICE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A support device configured to support a first part relative to a second part, minimizing the transfer of vibration between the two parts, includes a supporting system configured to use gas under pressure to provide a support force between the first and second parts; a gas chamber connected to the s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HOOPEN DERK, DUIJNHOVEN MARTINUS, KERP INGMAR AUGUST, OOMS WESLEY, HOON CORNELIUS ADRIANUS LAMBERTUS, BUTLER HANS, HAGE EDWARD, STARREVELD JEROEN PIETER, MEIJERS PIETER JOHANNES GERTRUDIS, DRAAIJER EVERT HENDRIK JAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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