METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES

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Hauptverfasser: VLADIMIRSKY YULI, ARIF MUHAMMAD, VLADIMIRSKY OLGA, WALSH JAMES
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creator VLADIMIRSKY YULI
ARIF MUHAMMAD
VLADIMIRSKY OLGA
WALSH JAMES
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_NL2010189A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>NL2010189A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_NL2010189A3</originalsourceid><addsrcrecordid>eNrjZLD2dQ3x8HcJVnD0c1FwDAhwDHIMCQ12DVZw8w9ScHENcXUO8fRzV3D29wtx9PX0c_QLUQCqCfF09nEN5mFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8X4-RgaGBoYWlo7GhFUAAE7ZKKs</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES</title><source>esp@cenet</source><creator>VLADIMIRSKY YULI ; ARIF MUHAMMAD ; VLADIMIRSKY OLGA ; WALSH JAMES</creator><creatorcontrib>VLADIMIRSKY YULI ; ARIF MUHAMMAD ; VLADIMIRSKY OLGA ; WALSH JAMES</creatorcontrib><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; ELECTROGRAPHY ; HOLOGRAPHY ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MATERIALS THEREFOR ; MEASURING ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; TESTING</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130808&amp;DB=EPODOC&amp;CC=NL&amp;NR=2010189A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130808&amp;DB=EPODOC&amp;CC=NL&amp;NR=2010189A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>VLADIMIRSKY YULI</creatorcontrib><creatorcontrib>ARIF MUHAMMAD</creatorcontrib><creatorcontrib>VLADIMIRSKY OLGA</creatorcontrib><creatorcontrib>WALSH JAMES</creatorcontrib><title>METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES</title><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MATERIALS THEREFOR</subject><subject>MEASURING</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLD2dQ3x8HcJVnD0c1FwDAhwDHIMCQ12DVZw8w9ScHENcXUO8fRzV3D29wtx9PX0c_QLUQCqCfF09nEN5mFgTUvMKU7lhdLcDPJuriHOHrqpBfnxqcUFicmpeakl8X4-RgaGBoYWlo7GhFUAAE7ZKKs</recordid><startdate>20130808</startdate><enddate>20130808</enddate><creator>VLADIMIRSKY YULI</creator><creator>ARIF MUHAMMAD</creator><creator>VLADIMIRSKY OLGA</creator><creator>WALSH JAMES</creator><scope>EVB</scope></search><sort><creationdate>20130808</creationdate><title>METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES</title><author>VLADIMIRSKY YULI ; ARIF MUHAMMAD ; VLADIMIRSKY OLGA ; WALSH JAMES</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_NL2010189A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2013</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MATERIALS THEREFOR</topic><topic>MEASURING</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>VLADIMIRSKY YULI</creatorcontrib><creatorcontrib>ARIF MUHAMMAD</creatorcontrib><creatorcontrib>VLADIMIRSKY OLGA</creatorcontrib><creatorcontrib>WALSH JAMES</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>VLADIMIRSKY YULI</au><au>ARIF MUHAMMAD</au><au>VLADIMIRSKY OLGA</au><au>WALSH JAMES</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES</title><date>2013-08-08</date><risdate>2013</risdate><oa>free_for_read</oa></addata></record>
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recordid cdi_epo_espacenet_NL2010189A
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MATERIALS THEREFOR
MEASURING
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
title METHODS AND APPARATUSES FOR DETECTING CONTAMINANT PARTICLES
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-05T02%3A36%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=VLADIMIRSKY%20YULI&rft.date=2013-08-08&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ENL2010189A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true