METHOD AND SYSTEM FOR APPLYING ION-SELECTIVE MEMBRANE ON ISFET SURFACE

The present invention provides a method and system for applying ion-selective membrane on Ion-Sensitive Field Effect Transistor (ISFET) surface without involving a mask step. In one embodiment multi-purpose ISFET devices are first prepared at wafer level using a standard Complementary Metal Oxide Se...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROZINA ABDUL RANI, MOHD. RAIS AHMAD, AIMAN SAJIDAH ABD. AZIZ, NORA'ZAH ABDUL RASHID
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
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