FILM-FORMING METHOD FOR FORMING PASSIVATION FILM AND MANUFACTURING METHOD FOR SOLAR CELL ELEMENT
THE CHALLENGE FOR THE PRESENT INVENTION IS TO PROVIDE A FILM-FORMING METHOD AND FOR FORMING A PASSIVATION FILM WHICH CAN SUFFICIENTLY INHIBIT THE LOSS OF CARRIERS DUE TO THEIR RECOMBINATION; AND A METHOD FOR MANUFACTURING A SOLAR CELL ELEMENT (1) WITH THE USE OF THE METHOD OR THE DEVICE. THE FILM-FO...
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