FILM-FORMING METHOD FOR FORMING PASSIVATION FILM AND MANUFACTURING METHOD FOR SOLAR CELL ELEMENT

THE CHALLENGE FOR THE PRESENT INVENTION IS TO PROVIDE A FILM-FORMING METHOD AND FOR FORMING A PASSIVATION FILM WHICH CAN SUFFICIENTLY INHIBIT THE LOSS OF CARRIERS DUE TO THEIR RECOMBINATION; AND A METHOD FOR MANUFACTURING A SOLAR CELL ELEMENT (1) WITH THE USE OF THE METHOD OR THE DEVICE. THE FILM-FO...

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Bibliographische Detailangaben
Hauptverfasser: KAZUYA SAITO, MASASHI KUBO, MIWA WATAI, MIHO SHIMIZU, MAKOTO KIKUCHI
Format: Patent
Sprache:eng
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