FILM-FORMING METHOD FOR FORMING PASSIVATION FILM AND MANUFACTURING METHOD FOR SOLAR CELL ELEMENT
THE CHALLENGE FOR THE PRESENT INVENTION IS TO PROVIDE A FILM-FORMING METHOD AND FOR FORMING A PASSIVATION FILM WHICH CAN SUFFICIENTLY INHIBIT THE LOSS OF CARRIERS DUE TO THEIR RECOMBINATION; AND A METHOD FOR MANUFACTURING A SOLAR CELL ELEMENT (1) WITH THE USE OF THE METHOD OR THE DEVICE. THE FILM-FO...
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creator | KAZUYA SAITO MASASHI KUBO MIWA WATAI MIHO SHIMIZU MAKOTO KIKUCHI |
description | THE CHALLENGE FOR THE PRESENT INVENTION IS TO PROVIDE A FILM-FORMING METHOD AND FOR FORMING A PASSIVATION FILM WHICH CAN SUFFICIENTLY INHIBIT THE LOSS OF CARRIERS DUE TO THEIR RECOMBINATION; AND A METHOD FOR MANUFACTURING A SOLAR CELL ELEMENT (1) WITH THE USE OF THE METHOD OR THE DEVICE. THE FILM-FORMING DEVICE (2, 3) COMPRISES A MOUNTING PORTION (22) FOR MOUNTING A FILM-FORMING OBJECT (S), A HIGH FREQUENCY POWER SOURCE (25), AND A SHOWER PLATE (23) WHICH IS PROVIDED TO FACE THE FILM-FORMING OBJECT (S) MOUNTED ON THE MOUNTING PORTION (22), WHICH INTRODUCES A FILM-FORMING GAS, AND TO WHICH THE HIGH FREQUENCY POWER SOURCE (25) IS CONNECTED AND A HIGH FREQUENCY VOLTAGE IS APPLIED. A LOW FREQUENCY POWER SOURCE (26) FOR APPLYING A LOW FREQUENCY VOLTAGE IS CONNECTED TO THE SHOWER PLATE (23) OR THE MOUNTING PORTION MOUNTING A SUBSTRATE. THE FILM-FORMING METHOD IS PERFORMED USING THE FILM-FORMING DEVICE (2, 3), AND THE FILM-FORMING METHOD IS CARRIED OUT IN FORMING A PASSIVATION FILM. (FIGURE 2) |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | FILM-FORMING METHOD FOR FORMING PASSIVATION FILM AND MANUFACTURING METHOD FOR SOLAR CELL ELEMENT |
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