ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE

ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE FOR GENERATING AN ION BEAM WITH A CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION. THE ION SOURCE (10) INCLUDES A DISCHARGE CHAMBER (16) AND AN ELECTROMAGNET (42; 42A-D) ADAPTED TO GENERATE A MAGNETIC FIELD (75) FOR CHANGING A PLAS...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	VIKTOR KANAROV, ALAN V. HAYES, RUSTAM, YEVTUKHOV, BORIS L. DRUZ
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!