ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE

ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE

ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE FOR GENERATING AN ION BEAM WITH A CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION. THE ION SOURCE (10) INCLUDES A DISCHARGE CHAMBER (16) AND AN ELECTROMAGNET (42; 42A-D) ADAPTED TO GENERATE A MAGNETIC FIELD (75) FOR CHANGING A PLAS...

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Hauptverfasser: VIKTOR KANAROV, ALAN V. HAYES, RUSTAM, YEVTUKHOV, BORIS L. DRUZ
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator VIKTOR KANAROV
ALAN V. HAYES
RUSTAM, YEVTUKHOV
BORIS L. DRUZ
description ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE FOR GENERATING AN ION BEAM WITH A CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION. THE ION SOURCE (10) INCLUDES A DISCHARGE CHAMBER (16) AND AN ELECTROMAGNET (42; 42A-D) ADAPTED TO GENERATE A MAGNETIC FIELD (75) FOR CHANGING A PLASMA DENSITY DISTRIBUTION INSIDE THE DISCHARGE CHAMBER (16). THE METHODS MAY INCLUDE GENERATING PLASMA (17) IN THE DISCHARGE SPACE (24), GENERATING AND SHAPING A MAGNETIC FIELD (75) IN THE DISCHARGE SPACE (24) BY APPLYING A CURRENT TO AN ELECTROMAGNET (42; 42A-D) THAT IS EFFECTIVE TO DEFINE THE PLASMA DENSITY DISTRIBUTION, EXTRACTING AN ION BEAM (15) FROM THE PLASMA (17), MEASURING A DISTRIBUTION PROFILE FOR THE ION BEAM DENSITY, AND COMPARING THE ACTUAL DISTRIBUTION PROFILE WITH A DESIRED DISTRIBUTION PROFILE FOR THE ION BEAM DENSITY. BASED UPON THE COMPARISON, THE CURRENT APPLIED TO THE ELECTROMAGNET (42; 42A-D) MAY BE ADJUSTED TO MODIFY MAGNETIC FIELD (75) THE MAGNETIC FIELD IN THE DISCHARGE SPACE AND, THEREBY, ALTER THE PLASMA DENSITY DISTRIBUTION.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE
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