ATMOSPHERIC-PRESSURE PLASMA PROCESSING APPARATUS AND METHOD

A plasma processing apparatus including powered electrodes having elongated planar surfaces; grounded electrodes having elongated planar surfaces parallel to and coextensive with the elongated surfaces of the powered electrodes, and spaced-apart a chosen distance therefrom, forming plasma regions, i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GREGORY A. ROCHE, DAVID W. TYNER, CARRIE E. CORNELIUS
Format:	Patent
Sprache:	eng ; spa
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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