APPARATUS FOR HOLDING AN OPTICAL PELLICLES

An apparatus for holding an optical pellicle (12) made up of a pellicle frame (14) and a pellicle membrane (16) is provided. The apparatus includes a substantially rigid, planar member (10) having a centrally disposed window (18) for removably receiving an optical pellicle. The inner dimension of th...

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1. Verfasser: YEN, YUNG-TSAI
Format: Patent
Sprache:eng ; kor
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