FILM-TYPE PROBE UNIT AND MANUFACTURING METHOD THEREOF

FILM-TYPE PROBE UNIT AND MANUFACTURING METHOD THEREOF

본 발명은 검사 대상물에 전기적 신호를 인가하여 불량 여부를 검사하는 필름형 프로브 유닛 및 그 제조 방법에 관한 것으로서, 특히, 검사 대상물의 접촉에 의해 필름이 휘어지게 되더라도 검사 대상물에 손상이 발생되지 않는 필름형 프로브 유닛 및 그 제조 방법에 관한 것이다....

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Hauptverfasser: KIM GYEONG YONG, OH JE HEON, HONG SEOK CHAN, IHM YI BIN, KIM JIN HAK, LEE HO HYUN, KIM KI SOO, KIM HYON TAE
Format: Patent
Sprache:eng ; kor
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator KIM GYEONG YONG
OH JE HEON
HONG SEOK CHAN
IHM YI BIN
KIM JIN HAK
LEE HO HYUN
KIM KI SOO
KIM HYON TAE
description 본 발명은 검사 대상물에 전기적 신호를 인가하여 불량 여부를 검사하는 필름형 프로브 유닛 및 그 제조 방법에 관한 것으로서, 특히, 검사 대상물의 접촉에 의해 필름이 휘어지게 되더라도 검사 대상물에 손상이 발생되지 않는 필름형 프로브 유닛 및 그 제조 방법에 관한 것이다.
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title FILM-TYPE PROBE UNIT AND MANUFACTURING METHOD THEREOF
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