IR sensor with nono-structure

개시된 적외선 센서는 기판과 복합층을 구비한다. 복합층은 흡수층과 센싱층을 구비한다. 흡수층은 광에너지를 흡수하는 층으로서 나노 구조를 구비한다. 센싱층은 복수의 온도 감지 셀을 구비한다. 기판에 반사층이 마련된다. 복합층은 반사층과의 사이에 공진 캐비티를 개재하여 기판의 상부에 배치된다. An infrared sensor includes a substrate, a reflective layer on an upper surface of the substrate, and a composite layer including an abso...

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Hauptverfasser: SONG, BYOUNG GWON, LEE, DU HYUN, RHEE, CHOONG HO, SEO, WON TAEK, KIM, JIN MYOUNG, YOON, YONG SEOP, YOU, JANG WOO
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creator SONG, BYOUNG GWON
LEE, DU HYUN
RHEE, CHOONG HO
SEO, WON TAEK
KIM, JIN MYOUNG
YOON, YONG SEOP
YOU, JANG WOO
description 개시된 적외선 센서는 기판과 복합층을 구비한다. 복합층은 흡수층과 센싱층을 구비한다. 흡수층은 광에너지를 흡수하는 층으로서 나노 구조를 구비한다. 센싱층은 복수의 온도 감지 셀을 구비한다. 기판에 반사층이 마련된다. 복합층은 반사층과의 사이에 공진 캐비티를 개재하여 기판의 상부에 배치된다. An infrared sensor includes a substrate, a reflective layer on an upper surface of the substrate, and a composite layer including an absorption layer including a nanostructure and configured to absorb light energy and a sensing layer including a plurality of temperature sensing cells, where the composite layer is above the upper surface of the substrate, and where the infrared ray sensor further includes a resonant cavity between the composite layer and the reflective layer.
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An infrared sensor includes a substrate, a reflective layer on an upper surface of the substrate, and a composite layer including an absorption layer including a nanostructure and configured to absorb light energy and a sensing layer including a plurality of temperature sensing cells, where the composite layer is above the upper surface of the substrate, and where the infrared ray sensor further includes a resonant cavity between the composite layer and the reflective layer.</abstract><oa>free_for_read</oa></addata></record>
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subjects COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
title IR sensor with nono-structure
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