CONTAINER FOR NON-RECTANGULAR RETICLE

본 발명은 타원형 레티클을 수용하도록 구성되고, 서로 결합될 때 타원형 공간을 정의하도록 구성되는 커버와 베이스를 포함하는 비직사각형 레티클용 컨테이너를 개시한다. 커버와 베이스에는 타원형 레티클을 단단히 고정하도록 구성된 레티클 리테이너와 레티클 지지대가 각각 있다. The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base...

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Hauptverfasser: CHIU MING CHIEN, CHEN YU RUEI, HSUEH HSIN MIN, CHUANG CHIA HO
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Sprache:eng ; kor
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creator CHIU MING CHIEN
CHEN YU RUEI
HSUEH HSIN MIN
CHUANG CHIA HO
description 본 발명은 타원형 레티클을 수용하도록 구성되고, 서로 결합될 때 타원형 공간을 정의하도록 구성되는 커버와 베이스를 포함하는 비직사각형 레티클용 컨테이너를 개시한다. 커버와 베이스에는 타원형 레티클을 단단히 고정하도록 구성된 레티클 리테이너와 레티클 지지대가 각각 있다. The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base which are configured to define an elliptical space when engaged with each other. The cover and the base have reticle retainers and reticle supports, respectively, which are configured to securely hold the elliptical reticle.
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The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base which are configured to define an elliptical space when engaged with each other. 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The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base which are configured to define an elliptical space when engaged with each other. 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The invention discloses a container for a non-rectangular reticle, adapted for accommodating an elliptical reticle, and including a cover and a base which are configured to define an elliptical space when engaged with each other. The cover and the base have reticle retainers and reticle supports, respectively, which are configured to securely hold the elliptical reticle.</abstract><oa>free_for_read</oa></addata></record>
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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
SEMICONDUCTOR DEVICES
title CONTAINER FOR NON-RECTANGULAR RETICLE
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