LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS

LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS

유체로부터 금속 또는 금속 이온을 여과하는데 매우 효과적인, 폴리올 리간드, 예컨대 n-메틸글루카민, 및/또는 폴리포스폰산 리간드를 포함하는 필터 재료가 설명된다. 필터 재료는 습식 에칭, 포토레지스트 제거, 및 마이크로전자 장치 제조의 세정 단계에 사용되는 것과 같이, 염기성 및 산성 유체 조성물을 여과하는데 특히 유용할 수 있다. Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic aci...

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Hauptverfasser: FILIPANCIC NICHOLAS J, BREWSTER JUSTIN, HAMZIK JAMES, JABER JAD A
Format: Patent
Sprache:eng ; kor
Schlagworte:
CHEMISTRY
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
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creator FILIPANCIC NICHOLAS J
BREWSTER JUSTIN
HAMZIK JAMES
JABER JAD A
description 유체로부터 금속 또는 금속 이온을 여과하는데 매우 효과적인, 폴리올 리간드, 예컨대 n-메틸글루카민, 및/또는 폴리포스폰산 리간드를 포함하는 필터 재료가 설명된다. 필터 재료는 습식 에칭, 포토레지스트 제거, 및 마이크로전자 장치 제조의 세정 단계에 사용되는 것과 같이, 염기성 및 산성 유체 조성물을 여과하는데 특히 유용할 수 있다. Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.
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Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. 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Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.</abstract><oa>free_for_read</oa></addata></record>
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subjects CHEMISTRY
METALLURGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
title LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS
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