Semiconductor line logistics processing system and method

반도체라인 물류처리 시스템 및 방법을 제공한다. 반도체라인 물류처리 방법은 반도체 라인내 물류이송을 위한 제1컨트롤모듈을 포함하는 제1라인설비가 선정되는 단계; 상기 물류이송을 위한 제2컨트롤모듈을 포함하는 제2라인설비가 상기 제1라인설비와 연동되는 단계; 및 상기 제1라인설비와 상기 제2라인설비 상호간에 OHT유닛이 물류이송을 수행하는 단계를 포함하며, 상기 OHT유닛은, 상기 제1라인설비와 상기 제2라인설비 간에서 직통방식의 물류이송을 위해 메인컨트롤유닛의 제어 하에 오토 라우팅(auto routing)방식으로 동작 된다. A...

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Hauptverfasser: PARK TAE UK, SO YOU SEUNG, YOON HYUN JOON
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SO YOU SEUNG
YOON HYUN JOON
description 반도체라인 물류처리 시스템 및 방법을 제공한다. 반도체라인 물류처리 방법은 반도체 라인내 물류이송을 위한 제1컨트롤모듈을 포함하는 제1라인설비가 선정되는 단계; 상기 물류이송을 위한 제2컨트롤모듈을 포함하는 제2라인설비가 상기 제1라인설비와 연동되는 단계; 및 상기 제1라인설비와 상기 제2라인설비 상호간에 OHT유닛이 물류이송을 수행하는 단계를 포함하며, 상기 OHT유닛은, 상기 제1라인설비와 상기 제2라인설비 간에서 직통방식의 물류이송을 위해 메인컨트롤유닛의 제어 하에 오토 라우팅(auto routing)방식으로 동작 된다. A semiconductor line logistics processing system and method are provided. A semiconductor line logistics processing method includes selecting a first line facility including a first control module for logistics transfer within a semiconductor line; interlocking a second line facility including a second control module for the logistics transfer with the first line facility; and performing the logistics transfer by the OHT unit between the first line facility and the second line facility, wherein the OHT unit is operated in an auto routing method under the control of the main control unit for logistics transfer in a direct method between the first line facility and the second line facility.
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A semiconductor line logistics processing system and method are provided. 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A semiconductor line logistics processing system and method are provided. 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A semiconductor line logistics processing system and method are provided. A semiconductor line logistics processing method includes selecting a first line facility including a first control module for logistics transfer within a semiconductor line; interlocking a second line facility including a second control module for the logistics transfer with the first line facility; and performing the logistics transfer by the OHT unit between the first line facility and the second line facility, wherein the OHT unit is operated in an auto routing method under the control of the main control unit for logistics transfer in a direct method between the first line facility and the second line facility.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
SEMICONDUCTOR DEVICES
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
title Semiconductor line logistics processing system and method
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