In-line transfer system
The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transf...
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| creator | CHOI MYUNG WOON CHOI SANG GYU HONG YE WON JEON OK CHUL PARK KWANG SOO LEE HYUN CHAN |
| description | The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transfer means which allows the shuttle to be transferred along the transfer rails. The shuttle comprises: right and left supports which are spaced in parallel apart from each other and correspond to each other on the right and left rails to be transferable; and a bridge which connects the both supports. Both front ends of the mask are seated on the right and left supports, respectively. The bridge is configured to connect the right and left supports across an upper side of the mask, the substrate, and the magnet plate. In addition, the in-line transfer system includes an anti-adhesion means which prevents a deposition substance emitted from an evaporation source from adhering to the transfer means, the support of the shuttle, the electromagnet rail, and the transfer rails. The anti-adhesion means comprises: a left anti-adhesion baffle which covers a bottom surface and inner surface of the left transfer rail and an inner surface of the left support of the shuttle; and a right anti-adhesion baffle which covers a bottom surface and inner surface of the electromagnet rail, a bottom surface of the right transfer rail, and an inner surface of the right support of the shuttle. According to the in-line transfer system of the present invention, a separate cleaning process is not required since contamination of the shuttle and transfer rail caused by deposition substances is aggressively prevented. Therefore, the present invention can enhance the manufacturing efficiency of an OLED display device since equipment for the cleaning process is also not required, and time for the cleaning process is not consumed.
본 발명에 따른 인라인 이송시스템은, 좌측 및 우측 이송레일과, 상기 이송레일을 따라 이송되며 마스크와 기판 및 자석판이 탑재되는 셔틀과, 상기 셔틀이 이송레일을 따라 이송되도록 하는 이송수단을 포함하여 이루어진다. 상기 셔틀은 서로 평행하게 이격 배치되어 좌측 및 우측 이송레일에 이송 가능하게 대응되는 좌측 및 우측 받침대와, 상기 양측 받침대를 연결하는 브릿지를 포함하며, 상기 좌측 및 우측 받침대에는 상기 마스크의 양선단이 각각 안착되며, 상기 브릿지는 상기 마스크와 기판 및 자석판의 상방을 가로질러 상기 좌측 및 우측 받침대를 연결하도록 구성된다. 또한 본 발명은 상기 증발원에서 배출되는 증착물질이 이송수단과 셔틀의 받침대 및 전자석 레일 과 이송레일에 점착되지 않도록 하는 방착수단을 포함하여 이루어진다. 상기 방착수단은 상기 좌측 이송레일의 저면과 내측면 및 셔틀의 좌측 받침대의 내측면을 커버하는 좌측 방착배플과, 상기 전자석 레일의 저면과 내측면과 우측 이송레일의 저면 및 셔틀의 우측 받침대의 내측면을 커버하는 우측 방착배플을 포함하여 이루어진다. 상술한 바와 같은 본 발명에 의한 인라인 이송시스템에 의하면, |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20240005626A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20240005626A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20240005626A3</originalsourceid><addsrcrecordid>eNrjZBD3zNPNycxLVSgpSswrTkstUiiuLC5JzeVhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHeQUYGRiYGBgamZkZmjsbEqQIARXUipg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>In-line transfer system</title><source>esp@cenet</source><creator>CHOI MYUNG WOON ; CHOI SANG GYU ; HONG YE WON ; JEON OK CHUL ; PARK KWANG SOO ; LEE HYUN CHAN</creator><creatorcontrib>CHOI MYUNG WOON ; CHOI SANG GYU ; HONG YE WON ; JEON OK CHUL ; PARK KWANG SOO ; LEE HYUN CHAN</creatorcontrib><description>The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transfer means which allows the shuttle to be transferred along the transfer rails. The shuttle comprises: right and left supports which are spaced in parallel apart from each other and correspond to each other on the right and left rails to be transferable; and a bridge which connects the both supports. Both front ends of the mask are seated on the right and left supports, respectively. The bridge is configured to connect the right and left supports across an upper side of the mask, the substrate, and the magnet plate. In addition, the in-line transfer system includes an anti-adhesion means which prevents a deposition substance emitted from an evaporation source from adhering to the transfer means, the support of the shuttle, the electromagnet rail, and the transfer rails. The anti-adhesion means comprises: a left anti-adhesion baffle which covers a bottom surface and inner surface of the left transfer rail and an inner surface of the left support of the shuttle; and a right anti-adhesion baffle which covers a bottom surface and inner surface of the electromagnet rail, a bottom surface of the right transfer rail, and an inner surface of the right support of the shuttle. According to the in-line transfer system of the present invention, a separate cleaning process is not required since contamination of the shuttle and transfer rail caused by deposition substances is aggressively prevented. Therefore, the present invention can enhance the manufacturing efficiency of an OLED display device since equipment for the cleaning process is also not required, and time for the cleaning process is not consumed.
본 발명에 따른 인라인 이송시스템은, 좌측 및 우측 이송레일과, 상기 이송레일을 따라 이송되며 마스크와 기판 및 자석판이 탑재되는 셔틀과, 상기 셔틀이 이송레일을 따라 이송되도록 하는 이송수단을 포함하여 이루어진다. 상기 셔틀은 서로 평행하게 이격 배치되어 좌측 및 우측 이송레일에 이송 가능하게 대응되는 좌측 및 우측 받침대와, 상기 양측 받침대를 연결하는 브릿지를 포함하며, 상기 좌측 및 우측 받침대에는 상기 마스크의 양선단이 각각 안착되며, 상기 브릿지는 상기 마스크와 기판 및 자석판의 상방을 가로질러 상기 좌측 및 우측 받침대를 연결하도록 구성된다. 또한 본 발명은 상기 증발원에서 배출되는 증착물질이 이송수단과 셔틀의 받침대 및 전자석 레일 과 이송레일에 점착되지 않도록 하는 방착수단을 포함하여 이루어진다. 상기 방착수단은 상기 좌측 이송레일의 저면과 내측면 및 셔틀의 좌측 받침대의 내측면을 커버하는 좌측 방착배플과, 상기 전자석 레일의 저면과 내측면과 우측 이송레일의 저면 및 셔틀의 우측 받침대의 내측면을 커버하는 우측 방착배플을 포함하여 이루어진다. 상술한 바와 같은 본 발명에 의한 인라인 이송시스템에 의하면, 증착물질에 의한 셔틀 및 이송레일의 오염이 적극적으로 방지되기 때문에 별도의 세정공정을 필요로 하지 않게 된다. 따라서 세정공정을 진행하기 위한 설비 또한 필요로 하지 않으며, 세정공정을 위한 시간이 소요되지 않기 때문에 결과적으로 OLED 디스플레이 장치의 제조 효율이 향상된다는 이점이 있다.</description><language>eng ; kor</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240112&DB=EPODOC&CC=KR&NR=20240005626A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240112&DB=EPODOC&CC=KR&NR=20240005626A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHOI MYUNG WOON</creatorcontrib><creatorcontrib>CHOI SANG GYU</creatorcontrib><creatorcontrib>HONG YE WON</creatorcontrib><creatorcontrib>JEON OK CHUL</creatorcontrib><creatorcontrib>PARK KWANG SOO</creatorcontrib><creatorcontrib>LEE HYUN CHAN</creatorcontrib><title>In-line transfer system</title><description>The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transfer means which allows the shuttle to be transferred along the transfer rails. The shuttle comprises: right and left supports which are spaced in parallel apart from each other and correspond to each other on the right and left rails to be transferable; and a bridge which connects the both supports. Both front ends of the mask are seated on the right and left supports, respectively. The bridge is configured to connect the right and left supports across an upper side of the mask, the substrate, and the magnet plate. In addition, the in-line transfer system includes an anti-adhesion means which prevents a deposition substance emitted from an evaporation source from adhering to the transfer means, the support of the shuttle, the electromagnet rail, and the transfer rails. The anti-adhesion means comprises: a left anti-adhesion baffle which covers a bottom surface and inner surface of the left transfer rail and an inner surface of the left support of the shuttle; and a right anti-adhesion baffle which covers a bottom surface and inner surface of the electromagnet rail, a bottom surface of the right transfer rail, and an inner surface of the right support of the shuttle. According to the in-line transfer system of the present invention, a separate cleaning process is not required since contamination of the shuttle and transfer rail caused by deposition substances is aggressively prevented. Therefore, the present invention can enhance the manufacturing efficiency of an OLED display device since equipment for the cleaning process is also not required, and time for the cleaning process is not consumed.
본 발명에 따른 인라인 이송시스템은, 좌측 및 우측 이송레일과, 상기 이송레일을 따라 이송되며 마스크와 기판 및 자석판이 탑재되는 셔틀과, 상기 셔틀이 이송레일을 따라 이송되도록 하는 이송수단을 포함하여 이루어진다. 상기 셔틀은 서로 평행하게 이격 배치되어 좌측 및 우측 이송레일에 이송 가능하게 대응되는 좌측 및 우측 받침대와, 상기 양측 받침대를 연결하는 브릿지를 포함하며, 상기 좌측 및 우측 받침대에는 상기 마스크의 양선단이 각각 안착되며, 상기 브릿지는 상기 마스크와 기판 및 자석판의 상방을 가로질러 상기 좌측 및 우측 받침대를 연결하도록 구성된다. 또한 본 발명은 상기 증발원에서 배출되는 증착물질이 이송수단과 셔틀의 받침대 및 전자석 레일 과 이송레일에 점착되지 않도록 하는 방착수단을 포함하여 이루어진다. 상기 방착수단은 상기 좌측 이송레일의 저면과 내측면 및 셔틀의 좌측 받침대의 내측면을 커버하는 좌측 방착배플과, 상기 전자석 레일의 저면과 내측면과 우측 이송레일의 저면 및 셔틀의 우측 받침대의 내측면을 커버하는 우측 방착배플을 포함하여 이루어진다. 상술한 바와 같은 본 발명에 의한 인라인 이송시스템에 의하면, 증착물질에 의한 셔틀 및 이송레일의 오염이 적극적으로 방지되기 때문에 별도의 세정공정을 필요로 하지 않게 된다. 따라서 세정공정을 진행하기 위한 설비 또한 필요로 하지 않으며, 세정공정을 위한 시간이 소요되지 않기 때문에 결과적으로 OLED 디스플레이 장치의 제조 효율이 향상된다는 이점이 있다.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBD3zNPNycxLVSgpSswrTkstUiiuLC5JzeVhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfHeQUYGRiYGBgamZkZmjsbEqQIARXUipg</recordid><startdate>20240112</startdate><enddate>20240112</enddate><creator>CHOI MYUNG WOON</creator><creator>CHOI SANG GYU</creator><creator>HONG YE WON</creator><creator>JEON OK CHUL</creator><creator>PARK KWANG SOO</creator><creator>LEE HYUN CHAN</creator><scope>EVB</scope></search><sort><creationdate>20240112</creationdate><title>In-line transfer system</title><author>CHOI MYUNG WOON ; CHOI SANG GYU ; HONG YE WON ; JEON OK CHUL ; PARK KWANG SOO ; LEE HYUN CHAN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20240005626A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2024</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>CHOI MYUNG WOON</creatorcontrib><creatorcontrib>CHOI SANG GYU</creatorcontrib><creatorcontrib>HONG YE WON</creatorcontrib><creatorcontrib>JEON OK CHUL</creatorcontrib><creatorcontrib>PARK KWANG SOO</creatorcontrib><creatorcontrib>LEE HYUN CHAN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHOI MYUNG WOON</au><au>CHOI SANG GYU</au><au>HONG YE WON</au><au>JEON OK CHUL</au><au>PARK KWANG SOO</au><au>LEE HYUN CHAN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>In-line transfer system</title><date>2024-01-12</date><risdate>2024</risdate><abstract>The present invention relates to an in-line transfer system. The in-line transfer system according to the present invention comprises: right and left transfer rails; a shuttle which is transferred along the transfer rails and on which a mask, a substrate, and a magnet plate are mounted; and a transfer means which allows the shuttle to be transferred along the transfer rails. The shuttle comprises: right and left supports which are spaced in parallel apart from each other and correspond to each other on the right and left rails to be transferable; and a bridge which connects the both supports. Both front ends of the mask are seated on the right and left supports, respectively. The bridge is configured to connect the right and left supports across an upper side of the mask, the substrate, and the magnet plate. In addition, the in-line transfer system includes an anti-adhesion means which prevents a deposition substance emitted from an evaporation source from adhering to the transfer means, the support of the shuttle, the electromagnet rail, and the transfer rails. The anti-adhesion means comprises: a left anti-adhesion baffle which covers a bottom surface and inner surface of the left transfer rail and an inner surface of the left support of the shuttle; and a right anti-adhesion baffle which covers a bottom surface and inner surface of the electromagnet rail, a bottom surface of the right transfer rail, and an inner surface of the right support of the shuttle. According to the in-line transfer system of the present invention, a separate cleaning process is not required since contamination of the shuttle and transfer rail caused by deposition substances is aggressively prevented. Therefore, the present invention can enhance the manufacturing efficiency of an OLED display device since equipment for the cleaning process is also not required, and time for the cleaning process is not consumed.
본 발명에 따른 인라인 이송시스템은, 좌측 및 우측 이송레일과, 상기 이송레일을 따라 이송되며 마스크와 기판 및 자석판이 탑재되는 셔틀과, 상기 셔틀이 이송레일을 따라 이송되도록 하는 이송수단을 포함하여 이루어진다. 상기 셔틀은 서로 평행하게 이격 배치되어 좌측 및 우측 이송레일에 이송 가능하게 대응되는 좌측 및 우측 받침대와, 상기 양측 받침대를 연결하는 브릿지를 포함하며, 상기 좌측 및 우측 받침대에는 상기 마스크의 양선단이 각각 안착되며, 상기 브릿지는 상기 마스크와 기판 및 자석판의 상방을 가로질러 상기 좌측 및 우측 받침대를 연결하도록 구성된다. 또한 본 발명은 상기 증발원에서 배출되는 증착물질이 이송수단과 셔틀의 받침대 및 전자석 레일 과 이송레일에 점착되지 않도록 하는 방착수단을 포함하여 이루어진다. 상기 방착수단은 상기 좌측 이송레일의 저면과 내측면 및 셔틀의 좌측 받침대의 내측면을 커버하는 좌측 방착배플과, 상기 전자석 레일의 저면과 내측면과 우측 이송레일의 저면 및 셔틀의 우측 받침대의 내측면을 커버하는 우측 방착배플을 포함하여 이루어진다. 상술한 바와 같은 본 발명에 의한 인라인 이송시스템에 의하면, 증착물질에 의한 셔틀 및 이송레일의 오염이 적극적으로 방지되기 때문에 별도의 세정공정을 필요로 하지 않게 된다. 따라서 세정공정을 진행하기 위한 설비 또한 필요로 하지 않으며, 세정공정을 위한 시간이 소요되지 않기 때문에 결과적으로 OLED 디스플레이 장치의 제조 효율이 향상된다는 이점이 있다.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; kor |
| recordid | cdi_epo_espacenet_KR20240005626A |
| source | esp@cenet |
| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | In-line transfer system |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-11T23%3A20%3A40IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHOI%20MYUNG%20WOON&rft.date=2024-01-12&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR20240005626A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |