Composition for processing the substrate and Method for processing the substrate using the same

A composition for processing a substrate of the present invention is a composition for processing a substrate coated with a metal-containing resist composition, and contains an organic solvent, an organic acid and an additive, wherein the additive includes a chelating agent made of quercetin and / o...

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Bibliographische Detailangaben
Hauptverfasser:	JO SU YEON, HAH JUNG HWAN, YANG JIN SEOK
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES APPARATUS SPECIALLY ADAPTED THEREFOR CANDLES CHEMISTRY CINEMATOGRAPHY DETERGENT COMPOSITIONS DETERGENTS ELECTROGRAPHY FATTY ACIDS THEREFROM HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS RECOVERY OF GLYCEROL RESIN SOAPS SOAP OR SOAP-MAKING USE OF SINGLE SUBSTANCES AS DETERGENTS
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