A system for inspecting board
The present invention relates to a substrate inspecting system. The substrate inspecting system according to one embodiment of the present invention preferably comprises: a substrate transferring unit which transfers a substrate to at least one inspection area; and a substrate inspecting unit which...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | The present invention relates to a substrate inspecting system. The substrate inspecting system according to one embodiment of the present invention preferably comprises: a substrate transferring unit which transfers a substrate to at least one inspection area; and a substrate inspecting unit which photographs the upper surface and the lower surface of the substrate placed in the inspection area and inspects a status of the substrate from an upper surface image wherein the upper surface of the substrate is photographed and a lower surface image wherein the lower surface of the substrate.
본 발명의 일 실시예에 따른 기판 검사 시스템은, 기판을 적어도 하나의 검사영역으로 이송하는 기판 이송부; 및 검사영역에 놓인 기판의 상면과 하면을 각각 촬영하여, 기판의 상면이 촬영된 상면이미지와, 기판의 하면이 촬영된 하면이미지로부터, 기판의 상태를 검사하는 기판 검사부를 포함하는 것이 바람직하다. |
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