System for diagnosing Performance Of Semiconductor Apparatus and Method for Driving The Same

The present invention relates to a performance diagnosis system for a semiconductor device and a driving method thereof. The performance diagnosis system for a semiconductor device includes: a sensing unit including a pressure sensor for measuring pressure of process gas stored in a measurement spac...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JI HYEON PARK, JEONG WOO YEOM, SEON HO KO, SANG MIN WOO, HYE SEON LEE, CHI WON AHN, TAE SUB NOH, BYEOUNG GEUN SON, DEOK GYU PARK, SEUNG JAE YANG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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