METHOD FOR INHIBITING FORMABLE MATERIAL EVAPORATION SYSTEM FOR INHIBITING EVAPORATION AND METHOD OF MAKING AN ARTICLE

The present invention relates to a method for inhibiting the evaporation of a formable material on a substrate. The method comprises the steps of: holding a substrate with a substrate chuck, wherein the substrate chuck is positioned within a central opening of a frame such that the frame surrounds a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FLETCHER EDWARD BRIAN, CONE CRAIG WILLIAM, SHACKLETON STEVEN C, YE ZHENGMAO, KONDO HIROYUKI
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!