Heater and substrate processing apparatus having the same

The present invention relates to a heater and a substrate processing apparatus including the same and, more specifically, to a heater and a substrate processing apparatus including the same for performing substrate processing, such as heat treatment. The heater (100) of the present invention compris...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JANG HEE SUP, PARK JUN YUNG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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