METHOD AND APPARATUS FOR GENERATING PROCESS SIMULATION MODEL

According to the technological idea of the present disclosure, provided is a method for generating a simulation model based on simulation data and measurement data for an object, which includes the steps of: classifying weight parameters included in a pre-learning model learned based on simulation d...

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Bibliographische Detailangaben
Hauptverfasser: JEONG CHANG WOOK, MOON HYO WON, MYUNG SANG HOON, CHOE JAE MYUNG, JEON YONG WOO
Format: Patent
Sprache:eng ; kor
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