Inspection apparatus and inspection method using same

According to exemplary embodiments according to the technical idea of the present invention, an inspection apparatus is provided. The inspection apparatus may include: an inspection signal source configured to irradiate a wafer with an inspection light beam having a frequency ranging from 0.1 tera h...

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Bibliographische Detailangaben
Hauptverfasser: JEON IK SEON, KIM KWANG RAK, PARK JUN BUM, LEE WON KI, YOON JONG MIN, BAEK IN KEUN, PRIWISCH MARTIN, PARK SU HWAN
Format: Patent
Sprache:eng ; kor
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