Prober having independent modular cell structure

Prober having independent modular cell structure

A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and...

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Hauptverfasser: SHIN KI HUN, PARK NAM WOO, PARK KI TACK
Format: Patent
Sprache:eng ; kor
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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creator SHIN KI HUN
PARK NAM WOO
PARK KI TACK
description A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and an electrical module installed below the prober stage chamber module, supporting the load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon. 독립 모듈형 셀 구조를 갖는 프로버가 개시된다. 본 발명의 일 실시예에 따른 독립 모듈형 셀 구조를 갖는 프로버는, 프로브 카드와 웨이퍼가 공급되어 검사가 이루어지는 프로버 스테이지 챔버 모듈; 및 상기 프로버 스테이지 챔버 모듈의 하부에 설치되고 상부의 상기 프로버 스테이지 챔버 모듈의 하중을 지지하는 동시에 전원과 제어 및 통신을 위한 전장품이 설치된 전장 모듈; 을 포함할 수 있다.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20220170635A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20220170635A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20220170635A3</originalsourceid><addsrcrecordid>eNrjZDAIKMpPSi1SyEgsy8xLV8jMS0ktSAUSeSUKufkppTmJRQrJqTk5CsUlRaXJJaVFqTwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JN47yMjAyMjA0NzAzNjU0Zg4VQA0uyyF</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Prober having independent modular cell structure</title><source>esp@cenet</source><creator>SHIN KI HUN ; PARK NAM WOO ; PARK KI TACK</creator><creatorcontrib>SHIN KI HUN ; PARK NAM WOO ; PARK KI TACK</creatorcontrib><description>A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and an electrical module installed below the prober stage chamber module, supporting the load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon. 독립 모듈형 셀 구조를 갖는 프로버가 개시된다. 본 발명의 일 실시예에 따른 독립 모듈형 셀 구조를 갖는 프로버는, 프로브 카드와 웨이퍼가 공급되어 검사가 이루어지는 프로버 스테이지 챔버 모듈; 및 상기 프로버 스테이지 챔버 모듈의 하부에 설치되고 상부의 상기 프로버 스테이지 챔버 모듈의 하중을 지지하는 동시에 전원과 제어 및 통신을 위한 전장품이 설치된 전장 모듈; 을 포함할 수 있다.</description><language>eng ; kor</language><subject>MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; TESTING</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20221230&amp;DB=EPODOC&amp;CC=KR&amp;NR=20220170635A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20221230&amp;DB=EPODOC&amp;CC=KR&amp;NR=20220170635A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHIN KI HUN</creatorcontrib><creatorcontrib>PARK NAM WOO</creatorcontrib><creatorcontrib>PARK KI TACK</creatorcontrib><title>Prober having independent modular cell structure</title><description>A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and an electrical module installed below the prober stage chamber module, supporting the load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon. 독립 모듈형 셀 구조를 갖는 프로버가 개시된다. 본 발명의 일 실시예에 따른 독립 모듈형 셀 구조를 갖는 프로버는, 프로브 카드와 웨이퍼가 공급되어 검사가 이루어지는 프로버 스테이지 챔버 모듈; 및 상기 프로버 스테이지 챔버 모듈의 하부에 설치되고 상부의 상기 프로버 스테이지 챔버 모듈의 하중을 지지하는 동시에 전원과 제어 및 통신을 위한 전장품이 설치된 전장 모듈; 을 포함할 수 있다.</description><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDAIKMpPSi1SyEgsy8xLV8jMS0ktSAUSeSUKufkppTmJRQrJqTk5CsUlRaXJJaVFqTwMrGmJOcWpvFCam0HZzTXE2UM3tSA_PrW4IDE5NS-1JN47yMjAyMjA0NzAzNjU0Zg4VQA0uyyF</recordid><startdate>20221230</startdate><enddate>20221230</enddate><creator>SHIN KI HUN</creator><creator>PARK NAM WOO</creator><creator>PARK KI TACK</creator><scope>EVB</scope></search><sort><creationdate>20221230</creationdate><title>Prober having independent modular cell structure</title><author>SHIN KI HUN ; PARK NAM WOO ; PARK KI TACK</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220170635A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2022</creationdate><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SHIN KI HUN</creatorcontrib><creatorcontrib>PARK NAM WOO</creatorcontrib><creatorcontrib>PARK KI TACK</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SHIN KI HUN</au><au>PARK NAM WOO</au><au>PARK KI TACK</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Prober having independent modular cell structure</title><date>2022-12-30</date><risdate>2022</risdate><abstract>A prober having an independent modular cell structure is disclosed. The prober having an independent modular cell structure according to one embodiment of the present invention includes: a prober stage chamber module in which a probe card and a wafer are supplied and an inspection is performed; and an electrical module installed below the prober stage chamber module, supporting the load of the prober stage chamber module, and having electrical components for power, control, and communication installed thereon. 독립 모듈형 셀 구조를 갖는 프로버가 개시된다. 본 발명의 일 실시예에 따른 독립 모듈형 셀 구조를 갖는 프로버는, 프로브 카드와 웨이퍼가 공급되어 검사가 이루어지는 프로버 스테이지 챔버 모듈; 및 상기 프로버 스테이지 챔버 모듈의 하부에 설치되고 상부의 상기 프로버 스테이지 챔버 모듈의 하중을 지지하는 동시에 전원과 제어 및 통신을 위한 전장품이 설치된 전장 모듈; 을 포함할 수 있다.</abstract><oa>free_for_read</oa></addata></record>
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Prober having independent modular cell structure
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