TUNNELING FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

A tunneling field effect transistor includes: a drain region formed on a substrate; a channel formed on the drain region; a dipole formation film formed on the channel; a source region formed on the dipole formation film; a gate insulating pattern surrounding the channel; and a gate electrode surrou...

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Hauptverfasser: SHIN MIN CHEOL, LIM YEONG JUN, SEO JUN BEOM
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Sprache:eng ; kor
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LIM YEONG JUN
SEO JUN BEOM
description A tunneling field effect transistor includes: a drain region formed on a substrate; a channel formed on the drain region; a dipole formation film formed on the channel; a source region formed on the dipole formation film; a gate insulating pattern surrounding the channel; and a gate electrode surrounding the gate insulating pattern. The dipole formation layer may be in contact with the channel and the source region to form a dipole between them. 터널링 전계 효과 트랜지스터는 기판 상에 형성된 드레인 영역, 상기 드레인 영역 상에 형성된 채널, 상기 채널 상에 형성된 쌍극자 형성막, 상기 쌍극자 형성막 상에 형성된 소스 영역, 상기 채널을 둘러싸는 게이트 절연 패턴, 및 상기 게이트 절연 패턴을 둘러싸는 게이트 전극을 포함할 수 있으며, 상기 쌍극자 형성막은 상기 채널과 상기 소스 영역에 접촉하여 이들 사이에 쌍극자(dipole)를 형성할 수 있다.
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The dipole formation layer may be in contact with the channel and the source region to form a dipole between them. 터널링 전계 효과 트랜지스터는 기판 상에 형성된 드레인 영역, 상기 드레인 영역 상에 형성된 채널, 상기 채널 상에 형성된 쌍극자 형성막, 상기 쌍극자 형성막 상에 형성된 소스 영역, 상기 채널을 둘러싸는 게이트 절연 패턴, 및 상기 게이트 절연 패턴을 둘러싸는 게이트 전극을 포함할 수 있으며, 상기 쌍극자 형성막은 상기 채널과 상기 소스 영역에 접촉하여 이들 사이에 쌍극자(dipole)를 형성할 수 있다.</description><language>eng ; kor</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220930&amp;DB=EPODOC&amp;CC=KR&amp;NR=20220132165A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20220930&amp;DB=EPODOC&amp;CC=KR&amp;NR=20220132165A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHIN MIN CHEOL</creatorcontrib><creatorcontrib>LIM YEONG JUN</creatorcontrib><creatorcontrib>SEO JUN BEOM</creatorcontrib><title>TUNNELING FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME</title><description>A tunneling field effect transistor includes: a drain region formed on a substrate; a channel formed on the drain region; a dipole formation film formed on the channel; a source region formed on the dipole formation film; a gate insulating pattern surrounding the channel; and a gate electrode surrounding the gate insulating pattern. 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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title TUNNELING FIELD EFFECT TRANSISTOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
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