EVAPORATION SYSTEM

A purpose of the present invention is to provide a substrate transport system that separately transports a substrate and a mask in a state in which they are not bonded in transporting a large area substrate deposition system. According to the purpose, the present invention provides a transport syste...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHOI SANG GYU, JEON OK CHUL, KIM MIN BAE, JEONG, KWANG HO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A purpose of the present invention is to provide a substrate transport system that separately transports a substrate and a mask in a state in which they are not bonded in transporting a large area substrate deposition system. According to the purpose, the present invention provides a transport system of a substrate mask separation type transport method in which a mask is deposited on a deposition chamber, wherein a substrate transport apparatus transports only the substrate. 본 발명의 목적은 대면적 기판 증착 시스템의 반송에 있어서, 기판과 마스크를 합착하지 않은 상태로 별도 반송하는 기판 반송 시스템을 제공하고자 하는 것이다. 상기 목적에 따라 본 발명은 기판반송기구가 기판만 반송하고, 마스크는 증착챔버에 비치되어 있는 기판 마스크 별도 반송방식의 반송시스템을 제공한다.