Laser Bonding Apparatus for Semiconductor Chip

Disclosed is a semiconductor chip laser bonding device, which includes: a mask module for selectively transmitting a laser beam to an upper surface region of a semiconductor chip located at a bonding position; a laser light emitting module located on the top of the mask module and irradiating the la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE SOUK WOO, KWON OH CHUL, KIM HYOUNG JUNE, KIM BYUNG KUK, BACK MIN SU, HAN MAENG KUN
Format: Patent
Sprache:eng ; kor
Schlagworte:
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