3 Three dimensional semiconductor memory device and method of fabricating the same

A three-dimensional semiconductor memory device is provided. A three-dimensional semiconductor memory device has stacked structures arranged spaced apart from each other on a semiconductor substrate. Each of the stacked structures includes: interlayer insulating layers and semiconductor patterns alt...

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Bibliographische Detailangaben

Hauptverfasser:	KANG BYEUNGMOO, SHIN JOONGCHAN, HAN SANGYEON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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