압전 코팅 및 증착 공정
본 발명은 A1-xMexN을 포함하는 압전 코팅(I)으로 코팅된 표면을 갖는 기판에 관한 것으로, A는 B, Al, Ga, In, Tl 중 적어도 하나이고 Me는 전이 금속 그룹 3b, 4b, 5b 6b 란탄족 및 Mg로 구성된 군으로부터 선택되는 적어도 하나의 금속 원소 Me이며, 코팅(I)은 두께 d를 갖고, 전이층(3)을 추가로 포함하고, Me의 원자 백분율 대 Al의 원자 백분율의 비는 하기 코팅의 두께 범위 δ3를 따라 꾸준히 증가한다. δ3≤d A substrate having a surface coated with a...
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| creator | HEINZ BERND ROBISCH VOLKER MAZZALAI ANDREA |
| description | 본 발명은 A1-xMexN을 포함하는 압전 코팅(I)으로 코팅된 표면을 갖는 기판에 관한 것으로, A는 B, Al, Ga, In, Tl 중 적어도 하나이고 Me는 전이 금속 그룹 3b, 4b, 5b 6b 란탄족 및 Mg로 구성된 군으로부터 선택되는 적어도 하나의 금속 원소 Me이며, 코팅(I)은 두께 d를 갖고, 전이층(3)을 추가로 포함하고, Me의 원자 백분율 대 Al의 원자 백분율의 비는 하기 코팅의 두께 범위 δ3를 따라 꾸준히 증가한다. δ3≤d
A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent δ3 of said coating for which there is valid:δ3≤d. |
| format | Patent |
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A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent δ3 of said coating for which there is valid:δ3≤d.</description><language>kor</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220318&DB=EPODOC&CC=KR&NR=20220034894A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220318&DB=EPODOC&CC=KR&NR=20220034894A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HEINZ BERND</creatorcontrib><creatorcontrib>ROBISCH VOLKER</creatorcontrib><creatorcontrib>MAZZALAI ANDREA</creatorcontrib><title>압전 코팅 및 증착 공정</title><description>본 발명은 A1-xMexN을 포함하는 압전 코팅(I)으로 코팅된 표면을 갖는 기판에 관한 것으로, A는 B, Al, Ga, In, Tl 중 적어도 하나이고 Me는 전이 금속 그룹 3b, 4b, 5b 6b 란탄족 및 Mg로 구성된 군으로부터 선택되는 적어도 하나의 금속 원소 Me이며, 코팅(I)은 두께 d를 갖고, 전이층(3)을 추가로 포함하고, Me의 원자 백분율 대 Al의 원자 백분율의 비는 하기 코팅의 두께 범위 δ3를 따라 꾸준히 증가한다. δ3≤d
A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent δ3 of said coating for which there is valid:δ3≤d.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZJB_M3XqmwUtCm_2Tnnb06rwekO_wptlc99sWKnwavPWNwum8jCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSSeO8gIwMjIwMDYxMLSxNHY-JUAQAh0C3Y</recordid><startdate>20220318</startdate><enddate>20220318</enddate><creator>HEINZ BERND</creator><creator>ROBISCH VOLKER</creator><creator>MAZZALAI ANDREA</creator><scope>EVB</scope></search><sort><creationdate>20220318</creationdate><title>압전 코팅 및 증착 공정</title><author>HEINZ BERND ; ROBISCH VOLKER ; MAZZALAI ANDREA</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220034894A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>kor</language><creationdate>2022</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>HEINZ BERND</creatorcontrib><creatorcontrib>ROBISCH VOLKER</creatorcontrib><creatorcontrib>MAZZALAI ANDREA</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HEINZ BERND</au><au>ROBISCH VOLKER</au><au>MAZZALAI ANDREA</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>압전 코팅 및 증착 공정</title><date>2022-03-18</date><risdate>2022</risdate><abstract>본 발명은 A1-xMexN을 포함하는 압전 코팅(I)으로 코팅된 표면을 갖는 기판에 관한 것으로, A는 B, Al, Ga, In, Tl 중 적어도 하나이고 Me는 전이 금속 그룹 3b, 4b, 5b 6b 란탄족 및 Mg로 구성된 군으로부터 선택되는 적어도 하나의 금속 원소 Me이며, 코팅(I)은 두께 d를 갖고, 전이층(3)을 추가로 포함하고, Me의 원자 백분율 대 Al의 원자 백분율의 비는 하기 코팅의 두께 범위 δ3를 따라 꾸준히 증가한다. δ3≤d
A substrate having a surface coated with a piezoelectric coating I, the coating including A-xMexN, wherein A is at least one of B, Al, Ga, In, Tl, and Me is at least one metallic element Me from the transition metal groups 3b, 4b, 5b 6b the lanthanides, and Mg the coating I having a thickness d, and further including a transition layer wherein the ratio of atomic percentage of Me to atomic percentage of Al steadily rises along a thickness extent δ3 of said coating for which there is valid:δ3≤d.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | 압전 코팅 및 증착 공정 |
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