분할된 양면 웨이퍼 및 레티클 클램프
정전 클램프 및 그 제조 방법이 개시된다. 정전 클램프는 제1 스택 및 제2 스택을 포함하며, 여기서 제1 스택은 제2 스택과 연결된다. 제1 스택 및 제2 스택의 각각은 클램프 몸체, 클램프 몸체 상에 배치된 하나 이상의 전극, 전극 상에 배치된 유전체 플레이트, 및 클램프 몸체 내부의 복수의 채널을 포함한다. An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second st...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Patent |
| Sprache: | kor |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | MONKMAN ERIC JUSTIN PEREZ FALCON VICTOR ANTONIO LIPSON MATTHEW |
| description | 정전 클램프 및 그 제조 방법이 개시된다. 정전 클램프는 제1 스택 및 제2 스택을 포함하며, 여기서 제1 스택은 제2 스택과 연결된다. 제1 스택 및 제2 스택의 각각은 클램프 몸체, 클램프 몸체 상에 배치된 하나 이상의 전극, 전극 상에 배치된 유전체 플레이트, 및 클램프 몸체 내부의 복수의 채널을 포함한다.
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20220010725A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20220010725A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20220010725A3</originalsourceid><addsrcrecordid>eNrjZDB6va3l7dQFryfMUXgzbeLrlVsU3sxe8Wbulre9exReb-hXeL2g4233hreNWxSA-PW8FW-ntPAwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUknjvICMDIyMDA0MDcyNTR2PiVAEA3tQ6uQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>분할된 양면 웨이퍼 및 레티클 클램프</title><source>esp@cenet</source><creator>MONKMAN ERIC JUSTIN ; PEREZ FALCON VICTOR ANTONIO ; LIPSON MATTHEW</creator><creatorcontrib>MONKMAN ERIC JUSTIN ; PEREZ FALCON VICTOR ANTONIO ; LIPSON MATTHEW</creatorcontrib><description>정전 클램프 및 그 제조 방법이 개시된다. 정전 클램프는 제1 스택 및 제2 스택을 포함하며, 여기서 제1 스택은 제2 스택과 연결된다. 제1 스택 및 제2 스택의 각각은 클램프 몸체, 클램프 몸체 상에 배치된 하나 이상의 전극, 전극 상에 배치된 유전체 플레이트, 및 클램프 몸체 내부의 복수의 채널을 포함한다.
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body.</description><language>kor</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SEMICONDUCTOR DEVICES</subject><creationdate>2022</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220126&DB=EPODOC&CC=KR&NR=20220010725A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25566,76549</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20220126&DB=EPODOC&CC=KR&NR=20220010725A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MONKMAN ERIC JUSTIN</creatorcontrib><creatorcontrib>PEREZ FALCON VICTOR ANTONIO</creatorcontrib><creatorcontrib>LIPSON MATTHEW</creatorcontrib><title>분할된 양면 웨이퍼 및 레티클 클램프</title><description>정전 클램프 및 그 제조 방법이 개시된다. 정전 클램프는 제1 스택 및 제2 스택을 포함하며, 여기서 제1 스택은 제2 스택과 연결된다. 제1 스택 및 제2 스택의 각각은 클램프 몸체, 클램프 몸체 상에 배치된 하나 이상의 전극, 전극 상에 배치된 유전체 플레이트, 및 클램프 몸체 내부의 복수의 채널을 포함한다.
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2022</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDB6va3l7dQFryfMUXgzbeLrlVsU3sxe8Wbulre9exReb-hXeL2g4233hreNWxSA-PW8FW-ntPAwsKYl5hSn8kJpbgZlN9cQZw_d1IL8-NTigsTk1LzUknjvICMDIyMDA0MDcyNTR2PiVAEA3tQ6uQ</recordid><startdate>20220126</startdate><enddate>20220126</enddate><creator>MONKMAN ERIC JUSTIN</creator><creator>PEREZ FALCON VICTOR ANTONIO</creator><creator>LIPSON MATTHEW</creator><scope>EVB</scope></search><sort><creationdate>20220126</creationdate><title>분할된 양면 웨이퍼 및 레티클 클램프</title><author>MONKMAN ERIC JUSTIN ; PEREZ FALCON VICTOR ANTONIO ; LIPSON MATTHEW</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20220010725A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>kor</language><creationdate>2022</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>MONKMAN ERIC JUSTIN</creatorcontrib><creatorcontrib>PEREZ FALCON VICTOR ANTONIO</creatorcontrib><creatorcontrib>LIPSON MATTHEW</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MONKMAN ERIC JUSTIN</au><au>PEREZ FALCON VICTOR ANTONIO</au><au>LIPSON MATTHEW</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>분할된 양면 웨이퍼 및 레티클 클램프</title><date>2022-01-26</date><risdate>2022</risdate><abstract>정전 클램프 및 그 제조 방법이 개시된다. 정전 클램프는 제1 스택 및 제2 스택을 포함하며, 여기서 제1 스택은 제2 스택과 연결된다. 제1 스택 및 제2 스택의 각각은 클램프 몸체, 클램프 몸체 상에 배치된 하나 이상의 전극, 전극 상에 배치된 유전체 플레이트, 및 클램프 몸체 내부의 복수의 채널을 포함한다.
An electrostatic clamp and a method for fabricating the same. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the clamp body, a dielectric plate disposed on the electrodes, and a plurality of channels inside the clamp body.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | kor |
| recordid | cdi_epo_espacenet_KR20220010725A |
| source | esp@cenet |
| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | 분할된 양면 웨이퍼 및 레티클 클램프 |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-18T07%3A11%3A17IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=MONKMAN%20ERIC%20JUSTIN&rft.date=2022-01-26&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR20220010725A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |